1. 2019
  2. High-resolution MEMS inertial sensor combining large-displacement buckling behaviour with integrated capacitive readout

    El Mansouri, B., Middelburg, L. M., Poelma, R. H., Zhang, G. Q., van Zeijl, H. W., Wei, J., Jiang, H., Vogel, J. G. & van Driel, W. D., 2019, In : Microsystems and Nanoengineering. 5, 1, p. 1-14 14 p., 60.

    Research output: Contribution to journalArticleScientificpeer-review

  3. MEMS Enabled Fast Time-Resolved X-Ray Diffraction Characterization Platform for Copper Nanoparticle Sintering in Heterogeneous Integration Applications

    Zhang, B., Wei, J., Bottger, A. J., van Zeijl, H. W., Sarro, P. M. & Zhang, G., 2019, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII): Proceedings. Danvers: IEEE, p. 1772-1775 4 p. 8808192

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

  4. Metal and Polymeric Strain Gauges for Si-based, Monolithically Fabricated Organs-on-Chips

    Quiros Solano, W. F., Gaio, N., Silvestri, C., Pandraud, G., Dekker, R. & Sarro, P. M., 2019, In : Micromachines. 10, 8, p. 1-15 15 p., 536.

    Research output: Contribution to journalArticleScientificpeer-review

  5. Timewalk correction for the Timepix3 chip obtained with real particle data

    Tsigaridas, S., Beuzekom, M. V., Graaf, H. V. D., Hartjes, F., Heijhoff, K., Hessey, N. P., de Jong, P. J. & Prodanovic, V., 2019, In : Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 930, p. 185-190

    Research output: Contribution to journalArticleScientificpeer-review

  6. Ultra-thin mems fabricated tynodes for electron multiplication

    Prodanovic, V., 2019, 130 p.

    Research output: ThesisDissertation (TU Delft)

  7. Vertical SiC taper with a small angle fabricated by slope transfer method

    Xin, Y., Pandraud, G. & French, P. J., 2019, In : Electronics Letters. 55, 11, p. 661-663 3 p.

    Research output: Contribution to journalArticleScientificpeer-review

  8. 2020
  9. Second flexural and torsional modes of vibration in suspended microfluidic resonator for liquid density measurements

    Belardinelli, P., D Souza, S., Verlinden, E., Wei, J., Staufer, U., Alijani, F. & Ghatkesar, M., 2020, In : Journal of Micromechanics and Microengineering. 30, 5, 10 p., 055003.

    Research output: Contribution to journalArticleScientificpeer-review

  10. Fabrication of Al-based superconducting high-aspect ratio TSVs for quantum 3D integration

    Alfaro Barrantes, J., Mastrangeli, M., Thoen, D., Bueno Lopez, J., Baselmans, J. & Sarro, L., 1 Jan 2020, 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020. Vol. 2020-January. p. 932-935 4 p. 9056165

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

  11. Superconducting High-Aspect Ratio Through-Silicon Vias with DC-Sputtered Al for Quantum 3D integration

    Alfaro Barrantes, J., Mastrangeli, M., Thoen, D., Visser, S., Bueno Lopez, J., Baselmans, J. & Sarro, L., Jul 2020, In : IEEE Electron Device Letters. 41, 7, p. 1114-1117 4 p.

    Research output: Contribution to journalArticleScientificpeer-review

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