1. Conference contribution › Scientific › Peer-reviewed
  2. A highly miniturized single-chip MOEMS scanner for all-in-one imaging solution

    Jovic, A., Uto, T., Hei, K., Sancho, J., Sanchez, N., Zinoviev, K., Rubio, J. L., Margallo, E., Pandraud, G. & Sarro, P. M., 2018, 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Piscataway, NJ: IEEE, Vol. 2018-January. p. 25-28 4 p.

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

  3. A novel mixing surface acoustic wave device for liquid sensing applications

    Bui, T. H., Morana, B., Scholtes, T., Chu Duc, T. & Sarro, L., 2016, 2016 IEEE 29th International Conference Micro Electro Mechanical Systems (MEMS). Piscataway, NJ: IEEE, p. 745-748 4 p.

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

  4. A transfer-free wafer-scale CVD graphene fabrication process for MEMS/NEMS sensors

    Vollebregt, S., Alfano, B., Ricciardella, F., Giesbers, A. J. M., Grachova, Y., van Zeijl, H., Polichetti, T. & Sarro, L., Jan 2016, 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS). Piscataway, NJ: IEEE, p. 17-20 4 p.

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

  5. Design and fabrication of two types of tapered waveguides for evanescent sensing

    Xin, Y., Zhang, Y., Pandraud, G. & French, P., 2017, Smart Systems Integration 2017: International Conference and Exhibition on Integration Issues of Miniaturized Systems. Otto, T. (ed.). Mesago Messe Frankfurt GmbH, p. 282-288 7 p.

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

  6. Design, Fabrication, Testing and Modeling of a Vaporizing Liquid Micro-Propulsion System

    van Wees, T., Hanselaar, C., Jansen, E., Cervone, A., Zandbergen, B. & van Zeijl, H., 2016, Space propulsion 2016. 12 p. SPC2016_3124914

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

  7. Designing a 100 [aF/nm] capacitive transducer

    Middelburg, L. M., Mansouri, B. E., Poelma, R. H., Van Zeijl, H. W., Wei, J., Zhang, G. Q. & Van Driel, W. D., 2018, 2018 19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2018. Piscataway, NJ: IEEE, p. 1-3 3 p.

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

  8. Effect of the interruption of the Propagation Path on the Response of Surface Acoustic Wave Transducers

    Bui, T., Tran, A., Morana, B., Wei, J., Chu Duc, T. & Sarro, P. M., 2016, 2016 IEEE Sensors Proceedings. Fontana, E. & Ruiz-Zamarreno, C. (eds.). Piscataway, NJ: IEEE, p. 1-3 3 p. 7808654

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

  9. Electro-thermal analysis and design of a combined MEMS impedance and micro hotplate device for gas sensing applications

    Venkatesh, M., Mansouri, B. E., Wei, J., Bossche, A. & Zhang, G. Q., 5 May 2016, 2016 17th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE). IEEE, p. 1-9 9 p.

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

  10. Fabrication of Al-based superconducting high-aspect ratio TSVs for quantum 3D integration

    Alfaro Barrantes, J., Mastrangeli, M., Thoen, D., Bueno Lopez, J., Baselmans, J. & Sarro, L., 1 Jan 2020, 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020. Vol. 2020-January. p. 932-935 4 p. 9056165

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

  11. Fabrication process of Si microlenses for OCT systems

    Jovic, A., Pandraud, G., Zinoviev, K., Rubio, J. L., Margallo, E. & Sarro, L., 2016, Proceedings of SPIE Micro-Optics 2016. Thienpont, H., Mohr, J., Zappe, H. & Nakajima, H. (eds.). Bellingham, WA: SPIE, p. 98880C-1/98888C-10 10 p. 98880C. (Proceedings of SPIE; no. 9888).

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

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