Research output

  1. Polymide sacrificial layer for an all-dry post-process surface micromachining module

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  2. Polyimide sacrificial layer and novel materials for post-processing surface micromachining

    Research output: Contribution to journalArticleScientificpeer-review

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ID: 322682