Research output

  1. Friction and dynamically dissipated energy dependence on temperature in polycrystalline silicon MEMS devices

    Research output: Contribution to journalArticleScientificpeer-review

  2. Characterization of Thermal Expansion Coefficient of LPCVD Polycrystalline SiC Thin Films Using Two Section V-beam Actuators

    Research output: Contribution to journalConference articleScientificpeer-review

  3. Controlling adhesion between multi-asperity contacting surfaces in MEMS devices by local heating

    Research output: Contribution to journalArticleScientificpeer-review

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ID: 201829