Research output

  1. Fabrication of Stretchable PDMS Membrane as Substrate Material for Multi-Electrode Array Devices

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionProfessional

  2. Improvement of wettability of silicon nitride in PECVD environment for copper electrodeposition in HAR vias

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

  3. Integration of a ¿hands-on¿ research training course in a high-discipline IC-processing research cleanroom

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

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