Research output

  1. Designing a 100 [aF/nm] capacitive transducer

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  2. Non-linear bulk micromachined accelerometer for high sensitivity applications

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  3. High aspect ratio spiral resonators for process variation investigation and MEMS applications

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

View all (8) »

ID: 144280