Research output

  1. High-resolution MEMS inertial sensor combining large-displacement buckling behaviour with integrated capacitive readout

    Research output: Contribution to journalArticleScientificpeer-review

  2. Designing a 100 [aF/nm] capacitive transducer

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  3. Non-linear bulk micromachined accelerometer for high sensitivity applications

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

View all (9) »

ID: 144280