Research output

  1. Low-temperature wafer-level packaging of a MEMS microreactor with a lateral feedthrough by local PECVD TEOS deposition

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

  2. Microhotplates with TiN heaters

    Research output: Contribution to journalArticleScientificpeer-review

  3. Step coverage of ALD nanolayers on 3D microstructures

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

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ID: 187207