Research output

  1. Local versus Global Optimization of Electron Lens System Design

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

  2. Understanding the influence of 3D sidewall roughness on observed line-edge roughness in scanning electron microscopy images

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

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Activities

  1. Electron-beam-induced deposition of sub-10 nanometer structures

    Activity: Talk or presentationTalk or presentation at a conference

  2. Statisch geladen

    Activity: Consultancy

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ID: 162041