Research output

  1. A study of the reproducibility of electron beam induced deposition for sub-20 nm lithography

    Research output: Contribution to journalArticleScientificpeer-review

  2. Charge-induced pattern displacement in E-beam lithography

    Research output: Contribution to journalArticleScientificpeer-review

  3. Electron beam lithography on curved or tilted surfaces: Simulations and experiments

    Research output: Contribution to journalArticleScientificpeer-review

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Activities

  1. Electron-beam-induced deposition of sub-10 nanometer structures

    Activity: Talk or presentationTalk or presentation at a conference

  2. Statisch geladen

    Activity: Consultancy

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ID: 162041