Research output

  1. A highly sensitive laser focus positioning method with sub-micrometre accuracy using coherent Fourier scatterometry

    Research output: Contribution to journalArticleScientificpeer-review

  2. Effect of polarization in evanescent wave amplification for the enhancement of scattering of nanoparticles on surfaces

    Research output: Contribution to journalArticleScientificpeer-review

  3. Machine learning techniques applied for the detection of nanoparticles on surfaces using coherent Fourier scatterometry

    Research output: Contribution to journalArticleScientificpeer-review

View all (4) »

ID: 11019005