1. 2014
  2. Selective coating deposition on high-Q single-crystal silicon resonators for the investigation of thermal noise statistical properties

    Serra, E., Bonaldi, M., Borrielli, A., Conti, L., Pandraud, G. & Sarro, PM., 2014, In : Procedia Engineering. 87, p. 1485-1488 4 p.

    Research output: Contribution to journalConference articleScientificpeer-review

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