Research output

  1. Nano-engineering with a focused helium ion beam

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  2. Fabrication of tunable clamped-clamped microresonators in silicon

    Research output: Contribution to journalArticleScientificpeer-review

  3. Helium on lithography

    Research output: Chapter in Book/Report/Conference proceedingChapterScientific

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Activities

  1. Microelectronic Engineering (Journal)

    Activity: Publication peer-review and editorial workPublication peer-review

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ID: 151319