Research output

  1. Characterization of Thermal Expansion Coefficient of LPCVD Polycrystalline SiC Thin Films Using Two Section V-beam Actuators

    Research output: Contribution to journalConference articleScientificpeer-review

  2. In-plane displacement detection with picometer accuracy on a conventional microscope

    Research output: Contribution to journalArticleScientificpeer-review

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  1. The impact of temperature on adhesion in MEMS devices

    Activity: Talk or presentationTalk or presentation at a conference

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ID: 164298