1. 2019
  2. A Wafer-Scale Process for the Monolithic Integration of CVD Graphene and CMOS Logic for Smart MEMS/NEMS Sensors

    Romijn, J., Vollebregt, S., van Zeijl, H. W. & Sarro, P. M., 2019, 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS). Piscataway: IEEE, p. 260-263 4 p. 8870741

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  3. MEMS Enabled Fast Time-Resolved X-Ray Diffraction Characterization Platform for Copper Nanoparticle Sintering in Heterogeneous Integration Applications

    Zhang, B., Wei, J., Bottger, A. J., van Zeijl, H. W., Sarro, P. M. & Zhang, G., 2019, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII): Proceedings. Danvers: IEEE, p. 1772-1775 4 p. 8808192

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  4. 2018
  5. Corrigendum to “Vaporizing liquid microthrusters with integrated heaters and temperature measurement” [Sens. Actuators A 265 (2017) 261–274](S0924424717306490)(10.1016/j.sna.2017.07.032)

    Silva, M. A. C., Guerrieri, D. C., van Zeijl, H., Cervone, A. & Gill, E., 1 Jul 2018, In : Sensors and Actuators, A: Physical. 277, 1 p.

    Research output: Contribution to journalComment/Letter to the editorScientificpeer-review

  6. Designing a 100 [aF/nm] capacitive transducer

    Middelburg, L. M., Mansouri, B. E., Poelma, R. H., Van Zeijl, H. W., Wei, J., Zhang, G. Q. & Van Driel, W. D., 2018, 2018 19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2018. Piscataway, NJ: IEEE, p. 1-3 3 p.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  7. Non-linear bulk micromachined accelerometer for high sensitivity applications

    Middelburg, L. M., Mansouri, B. E., Poelma, R., Zhang, G. Q., van Zeijl, H. & Wei, J., 2018, 2018 IEEE SENSORS Proceedings. Roy, A. & Gianchandani, Y. (eds.). Piscataway, NJ: IEEE, Vol. 2018-October. p. 1-4 4 p. 8589630

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  8. Three dimensional thermoacoustic device composed of nanoporous material and the method to fabricate such a device

    Poelma, R., Zhang, G. Q., Yi, H. & van Zeijl, H., 2018, IPC No. H04R, Priority date 1 Aug 2016, Priority No. NL 2017268

    Research output: PatentOther research output

  9. 2017
  10. Fabrication and characterization of low pressure micro-resistojets with integrated heater and temperature measurement

    Guerrieri, D. C., Silva, M. A. C., Van Zeijl, H., Cervone, A. & Gill, E., 30 Oct 2017, In : Journal of Micromechanics and Microengineering. 27, 12, 11 p., 125005.

    Research output: Contribution to journalArticleScientificpeer-review

  11. Vaporizing Liquid Microthrusters with integrated heaters and temperature measurement

    Silva, M. A. C., Cordeiro Guerrieri, D., van Zeijl, H., Cervone, A. & Gill, E., 1 Oct 2017, In : Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers. 265, p. 261-274 14 p.

    Research output: Contribution to journalArticleScientificpeer-review

  12. Effect of droplet shrinking on surface acoustic wave response in microfluidic applications

    Bui, T. H., Nguyen, V., Vollebregt, S., Morana, B., van Zeijl, H., Chu Duc, T. & Sarro, P. M., 2017, In : Applied Surface Science. 426, p. 253-261 9 p.

    Research output: Contribution to journalArticleScientificpeer-review

  13. High aspect ratio spiral resonators for process variation investigation and MEMS applications

    Middelburg, L. M., Mansouri, B. E., Van Zeijl, H. W., Zhang, G. Q. & Poelma, R. H., 2017, Proceedings of IEEE Sensors Conference 2017. Piscataway, NJ: IEEE, p. 1-3 3 p.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

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