1. 2020
  2. Toward a Self-Sensing Piezoresistive Pressure Sensor for all-SiC Monolithic Integration

    Middelburg, L. M., van Zeijl, H. W., Vollebregt, S., Morana, B. & Zhang, K., 2020, (Accepted/In press) In : IEEE Sensors Journal. 10 p.

    Research output: Contribution to journalArticleScientificpeer-review

  3. 2019
  4. A Wafer-Scale Process for the Monolithic Integration of CVD Graphene and CMOS Logic for Smart MEMS/NEMS Sensors

    Romijn, J., Vollebregt, S., van Zeijl, H. W. & Sarro, P. M., 2019, 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS). Piscataway: IEEE, p. 260-263 4 p. 8870741

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

  5. High-resolution MEMS inertial sensor combining large-displacement buckling behaviour with integrated capacitive readout

    El Mansouri, B., Middelburg, L. M., Poelma, R. H., Zhang, G. Q., van Zeijl, H. W., Wei, J., Jiang, H., Vogel, J. G. & van Driel, W. D., 2019, In : Microsystems and Nanoengineering. 5, 1, p. 1-14 14 p., 60.

    Research output: Contribution to journalArticleScientificpeer-review

  6. MEMS Enabled Fast Time-Resolved X-Ray Diffraction Characterization Platform for Copper Nanoparticle Sintering in Heterogeneous Integration Applications

    Zhang, B., Wei, J., Bottger, A. J., van Zeijl, H. W., Sarro, P. M. & Zhang, G., 2019, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII): Proceedings. Danvers: IEEE, p. 1772-1775 4 p. 8808192

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

  7. 2018
  8. Corrigendum to “Vaporizing liquid microthrusters with integrated heaters and temperature measurement” [Sens. Actuators A 265 (2017) 261–274](S0924424717306490)(10.1016/j.sna.2017.07.032)

    Silva, M. A. C., Guerrieri, D. C., van Zeijl, H., Cervone, A. & Gill, E., 1 Jul 2018, In : Sensors and Actuators, A: Physical. 277, 1 p.

    Research output: Contribution to journalComment/Letter to the editorScientificpeer-review

  9. Designing a 100 [aF/nm] capacitive transducer

    Middelburg, L. M., Mansouri, B. E., Poelma, R. H., Van Zeijl, H. W., Wei, J., Zhang, G. Q. & Van Driel, W. D., 2018, 2018 19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2018. Piscataway, NJ: IEEE, p. 1-3 3 p.

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

  10. Non-linear bulk micromachined accelerometer for high sensitivity applications

    Middelburg, L. M., Mansouri, B. E., Poelma, R., Zhang, G. Q., van Zeijl, H. & Wei, J., 2018, 2018 IEEE SENSORS Proceedings. Roy, A. & Gianchandani, Y. (eds.). Piscataway, NJ: IEEE, Vol. 2018-October. p. 1-4 4 p. 8589630

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

  11. Wafer-Scale Integration for Semi-Flexible Neural Implant Miniaturization

    Kluba, M., Morana, B., Savov, A., van Zeijl, H., Pandraud, G. & Dekker, R., 2018, In : Proceedings. 2, 13, 5 p., 941.

    Research output: Contribution to journalArticleScientificpeer-review

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