Research output

  1. High-resolution MEMS inertial sensor combining large-displacement buckling behaviour with integrated capacitive readout

    Research output: Contribution to journalArticleScientificpeer-review

  2. A 117DB in-Band CMRR 98.5DB SNR Capacitance-to-Digital Converter for Sub-NM Displacement Sensing with an Electrically Floating Target

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  3. A 19.8-mW Eddy-Current Displacement Sensor Interface with Sub-Nanometer Resolution

    Research output: Contribution to journalArticleScientificpeer-review

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ID: 102398