A highly miniturized single-chip MOEMS scanner for all-in-one imaging solution

Jovic, A., Uto, T., Hei, K., Sancho, J., Sanchez, N., Zinoviev, K., Rubio, J. L., Margallo, E., Pandraud, G. & Sarro, P. M., 2018, 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Piscataway, NJ: IEEE, Vol. 2018-January. p. 25-28 4 p.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review