Research output

  1. Magnetization losses in submicrometer CoFeB dots etched in a high ion density Cl2-based plasma

    Research output: Contribution to journalArticleScientificpeer-review

  2. Cl2-based inductively coupled plasma etching of photonic crystals in InP,

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

View all (12) »

ID: 311385