Research output

  1. Effect of unintentional surface layers in grating reconstruction with coherent Fourier Scatterometry.

    Research output: Contribution to journalArticleScientificpeer-review

  2. Electric field, Magnetic field and Magnetization: THz Time-Domain Spectroscopy Studies

    Research output: ThesisDissertation (TU Delft)Scientific

  3. Fourier ellipsometry: an ellipsometric approach to Fourier scatterometry

    Research output: Contribution to journalArticleScientificpeer-review

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ID: 185524