Research output

1. A study of the reproducibility of electron beam induced deposition for sub-20 nm lithography

   Research output: Contribution to journal › Article › Scientific › peer-review

2. Apparatus and method for inspecting a surface of a sample, using a multi-beam charged particle column

   Research output: Patent › Other research output

3. Design and simulation of a linear electron cavity for quantum electron microscopy

   Research output: Contribution to journal › Article › Scientific › peer-review

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