Research output

  1. Electrical characteristics of plasma-enhanced chemical vapor deposited silicon carbide thin films

    Research output: Contribution to journalArticleScientificpeer-review

  2. Electrical and optical properties of PECVD SiC thin films for surface micromachined devices

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

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ID: 317973