1. 2003
  2. Electrical characteristics of plasma-enhanced chemical vapor deposited silicon carbide thin films

    Pham, TMH., Akkaya, T., de Boer, CR. & Sarro, PM., 2003, In : Materials Science Forum. 433/436, p. 451-454 4 p.

    Research output: Contribution to journalArticleScientificpeer-review

  3. 2002
  4. Electrical and optical properties of PECVD SiC thin films for surface micromachined devices

    Pham, TMH., Akkaya, T., de Boer, CR., Visser, CCG. & Sarro, PM., 2002, SAFE 2002 Proceedings of 5th Semiconductor Advances for Future Electronics Workshop. Utrecht: STW Technology Foundation, p. 662-666 5 p.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

ID: 317973