Research output

  1. A study of the reproducibility of electron beam induced deposition for sub-20 nm lithography

    Research output: Contribution to journalArticleScientificpeer-review

  2. Quantum Noise Effects in e-Beam Lithography and Metrology

    Research output: ThesisDissertation (TU Delft)Scientific

  3. GPU accelerated Monte-Carlo simulation of SEM images for metrology

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

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ID: 157586