10 nm lines and spaces written in HSQ using electron beam lithography

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	822-824
Number of pages	3
Journal	Microelectronic Engineering
Volume	84
Publication status	Published - 2007

Keywords

@article{15d35c3953fa49f8a9bca9e1880a33da,

title = "10 nm lines and spaces written in HSQ using electron beam lithography",

keywords = "academic journal papers, CWTS JFIS < 0.75",

author = "AE Grigorescu and {van der Krogt}, MC and CW Hagen and P Kruit",

year = "2007",

language = "Undefined/Unknown",

volume = "84",

pages = "822--824",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

}