12.4: Relative humidity sensors based on porous polysilicon and porous silicon carbide

E Connolly, PJ French, TMH Pham, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings of IEEE sensors 2002: first IEEE international conference on sensors
Place of Publication	Piscataway
Publisher	IEEE Society
Pages	499-502
Number of pages	4
ISBN (Print)	0-7803-7455-X
Publication status	Published - 2002
Event	IEEE Sensors 2002: 1st International Conference on Sensors - Orlando, FL, United States Duration: 11 Jun 2002 → 14 Jun 2002

Name
Publisher	IEEE

Keywords

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title = "12.4: Relative humidity sensors based on porous polysilicon and porous silicon carbide",

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author = "E Connolly and PJ French and TMH Pham and PM Sarro",

year = "2002",

language = "Undefined/Unknown",

isbn = "0-7803-7455-X",

publisher = "IEEE Society",

pages = "499--502",

booktitle = "Proceedings of IEEE sensors 2002: first IEEE international conference on sensors",

note = "IEEE Sensors 2002 ; Conference date: 11-06-2002 Through 14-06-2002",

}

12.4: Relative humidity sensors based on porous polysilicon and porous silicon carbide. / Connolly, E; French, PJ; Pham, TMH et al.
Proceedings of IEEE sensors 2002: first IEEE international conference on sensors. Piscataway: IEEE Society, 2002. p. 499-502.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - 12.4: Relative humidity sensors based on porous polysilicon and porous silicon carbide

AU - Connolly, E

AU - French, PJ

AU - Pham, TMH

AU - Sarro, PM

PY - 2002

Y1 - 2002

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 0-7803-7455-X

SP - 499

EP - 502

BT - Proceedings of IEEE sensors 2002: first IEEE international conference on sensors

PB - IEEE Society

CY - Piscataway

T2 - IEEE Sensors 2002

Y2 - 11 June 2002 through 14 June 2002

ER -