@inproceedings{a55de7e3bbd04ddc97e25cb6ca2afdb6,
title = "3 DoF positioning of a capacitive measurement electrode using the thermal slider actuator",
author = "{van de Ven}, OS and JW Spronck and {Munnig Schmidt}, RH",
year = "2013",
language = "English",
publisher = "ASPE",
pages = "58--63",
editor = "DL Trumper and SJ Ludwick and {Munnig Schmidt}, RH",
booktitle = "Proceedings 2013 MIT & American Society for Precision Engineering Spring Topical Meeting on Precision Control for Advanced Manufacturing Systems",
note = "ASPE 2013 Spring Topical Meeting - Precision Control for Advanced Manufacturing Systems, Cambridge, MA, USA ; Conference date: 21-04-2013 Through 23-04-2013",
}