3 DoF positioning of a capacitive measurement electrode using the thermal slider actuator

OS van de Ven, JW Spronck, RH Munnig Schmidt

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationProceedings 2013 MIT & American Society for Precision Engineering Spring Topical Meeting on Precision Control for Advanced Manufacturing Systems
EditorsDL Trumper, SJ Ludwick, RH Munnig Schmidt
Place of PublicationRayleigh, NC, USA
PublisherASPE
Pages58-63
Number of pages6
Publication statusPublished - 2013
EventASPE 2013 Spring Topical Meeting - Precision Control for Advanced Manufacturing Systems, Cambridge, MA, USA - Rayleigh, NC, USA
Duration: 21 Apr 201323 Apr 2013

Publication series

Name
PublisherASPE

Conference

ConferenceASPE 2013 Spring Topical Meeting - Precision Control for Advanced Manufacturing Systems, Cambridge, MA, USA
Period21/04/1323/04/13

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