3D SiC CMOS compatible surface micromachined accelerometer

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings of APCOT 2008
Editors	s.n.
Place of Publication	Tainan, Taiwan
Publisher	IEEE Society
Pages	1-4
Number of pages	4
Publication status	Published - 2008
Event	APCOT 2008, Tainan, Taiwan - Tainan, Taiwan Duration: 22 Jun 2008 → 25 Jun 2008

Name
Publisher	IEEE

Conference	APCOT 2008, Tainan, Taiwan
Period	22/06/08 → 25/06/08

Keywords

@inproceedings{c9b0bdfa3a7a4838abf0bd9dfa9faa89,

title = "3D SiC CMOS compatible surface micromachined accelerometer",

keywords = "Elektrotechniek, Techniek, conference contrib. refereed, Conf.proc. > 3 pag",

author = "L Pakula and H Yang and PJ French",

year = "2008",

language = "Undefined/Unknown",

publisher = "IEEE Society",

pages = "1--4",

editor = "s.n.",

booktitle = "Proceedings of APCOT 2008",

note = "APCOT 2008, Tainan, Taiwan ; Conference date: 22-06-2008 Through 25-06-2008",

}

TY - GEN

T1 - 3D SiC CMOS compatible surface micromachined accelerometer

AU - Pakula, L

AU - Yang, H

AU - French, PJ

PY - 2008

Y1 - 2008

KW - Elektrotechniek

KW - Techniek

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SP - 1

EP - 4

BT - Proceedings of APCOT 2008

A2 - s.n., null

PB - IEEE Society

CY - Tainan, Taiwan

T2 - APCOT 2008, Tainan, Taiwan

Y2 - 22 June 2008 through 25 June 2008

ER -