3-D silicon carbide surface micromachined accelerometer compatible with CMOS processing

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings of ASDAM 2008
Editors	s.n.
Place of Publication	smolenice,slovakia
Publisher	Slovak Academy of Sciences
Pages	227-230
Number of pages	4
ISBN (Print)	978-1-4244-2325-5
Publication status	Published - 2008
Event	IEEE Advanced semiconductor devices and microsystems (ASDAM) 2008, Smolenice, Slovakia - smolenice,slovakia Duration: 12 Oct 2008 → 16 Oct 2008

Name
Publisher	Slovak academy of sciences

Conference	IEEE Advanced semiconductor devices and microsystems (ASDAM) 2008, Smolenice, Slovakia
Period	12/10/08 → 16/10/08

Keywords

@inproceedings{ac78463d309842298b51253d6fac484e,

title = "3-D silicon carbide surface micromachined accelerometer compatible with CMOS processing",

keywords = "conference contrib. non-refer., Conf.proc. > 3 pag",

author = "L Pakula and H Yang and PJ French",

year = "2008",

language = "Undefined/Unknown",

isbn = "978-1-4244-2325-5",

publisher = "Slovak Academy of Sciences",

pages = "227--230",

editor = "s.n.",

booktitle = "Proceedings of ASDAM 2008",

address = "Slovakia",

note = "IEEE Advanced semiconductor devices and microsystems (ASDAM) 2008, Smolenice, Slovakia ; Conference date: 12-10-2008 Through 16-10-2008",

}

TY - GEN

T1 - 3-D silicon carbide surface micromachined accelerometer compatible with CMOS processing

AU - Pakula, L

AU - Yang, H

AU - French, PJ

PY - 2008

Y1 - 2008

KW - conference contrib. non-refer.

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-1-4244-2325-5

SP - 227

EP - 230

BT - Proceedings of ASDAM 2008

A2 - s.n., null

PB - Slovak Academy of Sciences

CY - smolenice,slovakia

T2 - IEEE Advanced semiconductor devices and microsystems (ASDAM) 2008, Smolenice, Slovakia

Y2 - 12 October 2008 through 16 October 2008

ER -