6.4 mm Diameter Silicon Micromachined Lens for THz Dielectric Antenna

Choonsup Lee; Goutam Chattopadhyay; Maria Alonso Del Pino; Nuria Llombart

doi:10.1109/IRMMW-THz.2014.6956392

6.4 mm Diameter Silicon Micromachined Lens for THz Dielectric Antenna

Choonsup Lee, Goutam Chattopadhyay, Maria Alonso Del Pino, Nuria Llombart

Tera-Hertz Sensing

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

4 Citations (Scopus)

Abstract

In this paper, we have microfabricated a 6.4 mm diameter silicon lens array on a 4 inch silicon wafer using silicon micromachining technique. The goal of this lens array is to build a 2×2 lens antenna array for 1.9 THz receiver application. It requires multiple thick photoresist coatings and long selective etching of silicon and photoresist after thermal reflow process. To the authors' knowledge, this is the biggest silicon lens ever microfabricated by semiconductor process.

Original language	English
Title of host publication	Proceedings - 2014 39th International Conference on Infrared, Millimeter, and Terahertz Waves
Editors	P.H. Siegel, C. Walker
Publisher	IEEE
Pages	1-1
Number of pages	1
ISBN (Electronic)	978-1-4799-3877-3
DOIs	https://doi.org/10.1109/IRMMW-THz.2014.6956392
Publication status	Published - 2014
Event	IRMMW-THz 2014: 39th International Conference on Infrared, Millimeter and Terahertz Waves - Tucson, AZ, United States Duration: 14 Sept 2014 → 19 Sept 2014 Conference number: 39

Conference

Conference	IRMMW-THz 2014
Country/Territory	United States
City	Tucson, AZ
Period	14/09/14 → 19/09/14

Keywords

Lenses
Silicon
Resists
Arrays
Antenna arrays
Etching
Micromachining

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10.1109/IRMMW-THz.2014.6956392

Cite this

@inproceedings{5a097fd08367437193328e2d4fb0b1a5,

title = "6.4 mm Diameter Silicon Micromachined Lens for THz Dielectric Antenna",

abstract = "In this paper, we have microfabricated a 6.4 mm diameter silicon lens array on a 4 inch silicon wafer using silicon micromachining technique. The goal of this lens array is to build a 2×2 lens antenna array for 1.9 THz receiver application. It requires multiple thick photoresist coatings and long selective etching of silicon and photoresist after thermal reflow process. To the authors' knowledge, this is the biggest silicon lens ever microfabricated by semiconductor process.",

keywords = "Lenses, Silicon, Resists, Arrays, Antenna arrays, Etching, Micromachining",

author = "Choonsup Lee and Goutam Chattopadhyay and {Alonso Del Pino}, Maria and Nuria Llombart",

year = "2014",

doi = "10.1109/IRMMW-THz.2014.6956392",

language = "English",

pages = "1--1",

editor = "P.H. Siegel and C. Walker",

booktitle = "Proceedings - 2014 39th International Conference on Infrared, Millimeter, and Terahertz Waves",

publisher = "IEEE",

address = "United States",

note = "IRMMW-THz 2014 : 39th International Conference on Infrared, Millimeter and Terahertz Waves ; Conference date: 14-09-2014 Through 19-09-2014",

}

Lee, C, Chattopadhyay, G, Alonso Del Pino, M & Llombart, N 2014, 6.4 mm Diameter Silicon Micromachined Lens for THz Dielectric Antenna. in PH Siegel & C Walker (eds), Proceedings - 2014 39th International Conference on Infrared, Millimeter, and Terahertz Waves., 6956392, IEEE, pp. 1-1, IRMMW-THz 2014, Tucson, AZ, United States, 14/09/14. https://doi.org/10.1109/IRMMW-THz.2014.6956392

6.4 mm Diameter Silicon Micromachined Lens for THz Dielectric Antenna. / Lee, Choonsup; Chattopadhyay, Goutam; Alonso Del Pino, Maria et al.
Proceedings - 2014 39th International Conference on Infrared, Millimeter, and Terahertz Waves. ed. / P.H. Siegel; C. Walker. IEEE, 2014. p. 1-1 6956392.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - 6.4 mm Diameter Silicon Micromachined Lens for THz Dielectric Antenna

AU - Lee, Choonsup

AU - Chattopadhyay, Goutam

AU - Alonso Del Pino, Maria

AU - Llombart, Nuria

N1 - Conference code: 39

PY - 2014

Y1 - 2014

N2 - In this paper, we have microfabricated a 6.4 mm diameter silicon lens array on a 4 inch silicon wafer using silicon micromachining technique. The goal of this lens array is to build a 2×2 lens antenna array for 1.9 THz receiver application. It requires multiple thick photoresist coatings and long selective etching of silicon and photoresist after thermal reflow process. To the authors' knowledge, this is the biggest silicon lens ever microfabricated by semiconductor process.

AB - In this paper, we have microfabricated a 6.4 mm diameter silicon lens array on a 4 inch silicon wafer using silicon micromachining technique. The goal of this lens array is to build a 2×2 lens antenna array for 1.9 THz receiver application. It requires multiple thick photoresist coatings and long selective etching of silicon and photoresist after thermal reflow process. To the authors' knowledge, this is the biggest silicon lens ever microfabricated by semiconductor process.

KW - Lenses

KW - Silicon

KW - Resists

KW - Arrays

KW - Antenna arrays

KW - Etching

KW - Micromachining

UR - http://www.scopus.com/inward/record.url?scp=84911977919&partnerID=8YFLogxK

U2 - 10.1109/IRMMW-THz.2014.6956392

DO - 10.1109/IRMMW-THz.2014.6956392

M3 - Conference contribution

AN - SCOPUS:84911977919

SP - 1

EP - 1

BT - Proceedings - 2014 39th International Conference on Infrared, Millimeter, and Terahertz Waves

A2 - Siegel, P.H.

A2 - Walker, C.

PB - IEEE

T2 - IRMMW-THz 2014

Y2 - 14 September 2014 through 19 September 2014

ER -

6.4 mm Diameter Silicon Micromachined Lens for THz Dielectric Antenna

Abstract

Conference

Keywords

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