Abstract
This article describes a high-performance capacitance-to-digital converter (CDC) for sub-nm displacement sensing with an electrically floating target. Intended to be integrated into a displacement sensor probe, the CDC consumes only 560μW. It achieves 98.5-dB SNR in a 1-ms conversion time. With a sensing O 8-mm probe and a 25μm stand-off distance from the target, it achieves 0.18-nm resolution. Moreover, it offers an in-band common-mode rejection ratio (CMRR) higher than 117 dB, providing decent electric field interference immunity.
Original language | English |
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Article number | 8897040 |
Pages (from-to) | 9-12 |
Number of pages | 4 |
Journal | IEEE Solid-State Circuits Letters |
Volume | 3 |
Issue number | 1 |
DOIs | |
Publication status | Published - 1 Dec 2020 |
Keywords
- Capacitance-to-digital converter (CDC)
- chopping
- electric field interference immunity
- energy-efficient
- readout
- sub-nm displacement sensing