A displacement-to-digital converter (DDC) based on inductive (eddy-current) sensor is presented. The sensor is embedded in a self-oscillating front-end, whose 145MHz output is then digitized by a ratiometric ΔΣ ADC. Over a 10μm range, the DDC achieves 1.85nm resolution (1.02 pH), in a 2kHz bandwidth. It draws 9.1mW from a 1.8 V supply making it the most energy-efficient ECS interface ever reported.
Original languageEnglish
Title of host publicationDigest of Technical Papers - 2017 Symposium on VLSI Circuits
Place of PublicationPiscataway, NJ
PublisherIEEE
PagesC80-C81
Number of pages2
ISBN (Electronic)978-4-86348-614-0
ISBN (Print)978-4-86348-606-5
DOIs
Publication statusPublished - 2017
Event2017 Symposium on VLSI Technology and Circuits: 2017 VLSI Technology Symposium - 2017 VLSI Circuits Symposium - Kyoto, Japan
Duration: 5 Jun 20178 Jun 2017
http://vlsisymposium.org/2017/

Conference

Conference2017 Symposium on VLSI Technology and Circuits
CountryJapan
CityKyoto
Period5/06/178/06/17
Internet address

    Research areas

  • eddy-current, inductance, displacement, sensor, precision, chopping, delta, sigma, ADC, oscillator

ID: 37220431