Abstract
A displacement-to-digital converter (DDC) based on inductive (eddy-current) sensor is presented. The sensor is embedded in a self-oscillating front-end, whose 145MHz output is then digitized by a ratiometric ΔΣ ADC. Over a 10μm range, the DDC achieves 1.85nm resolution (1.02 pH), in a 2kHz bandwidth. It draws 9.1mW from a 1.8 V supply making it the most energy-efficient ECS interface ever reported.
Original language | English |
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Title of host publication | Digest of Technical Papers - 2017 Symposium on VLSI Circuits |
Place of Publication | Piscataway, NJ |
Publisher | IEEE |
Pages | C80-C81 |
Number of pages | 2 |
ISBN (Electronic) | 978-4-86348-614-0 |
ISBN (Print) | 978-4-86348-606-5 |
DOIs | |
Publication status | Published - 2017 |
Event | 2017 Symposium on VLSI Technology and Circuits: 2017 VLSI Technology Symposium - 2017 VLSI Circuits Symposium - Kyoto, Japan Duration: 5 Jun 2017 → 8 Jun 2017 http://vlsisymposium.org/2017/ |
Conference
Conference | 2017 Symposium on VLSI Technology and Circuits |
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Country/Territory | Japan |
City | Kyoto |
Period | 5/06/17 → 8/06/17 |
Internet address |
Bibliographical note
C7-2Keywords
- eddy-current
- inductance
- displacement
- sensor
- precision
- chopping
- delta
- sigma
- ADC
- oscillator