A combined objective lens for electrons and ions

PWH Jager, MCW Kelder, P Kruit

    Research output: Contribution to journalArticleScientificpeer-review

    2 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)427-430
    Number of pages4
    JournalMicroelectronic Engineering
    Volume30
    Publication statusPublished - 1996

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