A comparative study of the strength of Si, SiN and SiC used at nanoscales

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	SAFE 2007 Semiconductor advances for future electornics
Editors	s.n.
Place of Publication	Veldhoven, The Netherlands
Publisher	STW
Pages	395-398
Number of pages	4
ISBN (Print)	978-90-73461-49-9
Publication status	Published - 2007

Name
Publisher	STW

Keywords

@inproceedings{2aa7f9d51ec54558b3e02f2997ae6c86,

title = "A comparative study of the strength of Si, SiN and SiC used at nanoscales",

keywords = "conference contrib. refereed, Vakpubl., Overig wet. > 3 pag",

author = "T Alan and PM Sarro",

year = "2007",

language = "Undefined/Unknown",

isbn = "978-90-73461-49-9",

publisher = "STW",

pages = "395--398",

editor = "s.n.",

booktitle = "SAFE 2007 Semiconductor advances for future electornics",

}

TY - GEN

T1 - A comparative study of the strength of Si, SiN and SiC used at nanoscales

AU - Alan, T

AU - Sarro, PM

PY - 2007

Y1 - 2007

KW - conference contrib. refereed

KW - Vakpubl., Overig wet. > 3 pag

M3 - Conference contribution

SN - 978-90-73461-49-9

SP - 395

EP - 398

BT - SAFE 2007 Semiconductor advances for future electornics

A2 - s.n., null

PB - STW

CY - Veldhoven, The Netherlands

ER -