A comparative study of the strength of Si, SiN and SiC used at nanoscales - Materials and devices

T Alan; PM Sarro

A comparative study of the strength of Si, SiN and SiC used at nanoscales - Materials and devices

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Material research society symposium proceeding
Editors	DA LaVan, MG da Silva, SM Spearing, S Vengallatore
Place of Publication	Warrendale
Publisher	Materials Research Society
Pages	1-5
Number of pages	5
ISBN (Print)	978-1-55899-990-9
Publication status	Published - 2007
Event	MRS fall meeting 2007, Boston, USA - Warrendale Duration: 26 Nov 2007 → 30 Nov 2007

Publication series

Name
Publisher	Materials Research Society

Name	Materials Research Society Symposium Proceedings
Volume	1052
ISSN (Print)	0272-9172

Conference

Conference	MRS fall meeting 2007, Boston, USA
Period	26/11/07 → 30/11/07

Bibliographical note

NEO

Keywords

Conf.proc. > 3 pag

Cite this

@inproceedings{e21779fe8edb4732b5d4fd13a02f0655,

title = "A comparative study of the strength of Si, SiN and SiC used at nanoscales - Materials and devices",

keywords = "Conf.proc. > 3 pag",

author = "T Alan and PM Sarro",

note = "NEO; MRS fall meeting 2007, Boston, USA ; Conference date: 26-11-2007 Through 30-11-2007",

year = "2007",

language = "Undefined/Unknown",

isbn = "978-1-55899-990-9",

publisher = "Materials Research Society",

pages = "1--5",

editor = "DA LaVan and {da Silva}, MG and SM Spearing and S Vengallatore",

booktitle = "Material research society symposium proceeding",

address = "United States",

}

Alan, T & Sarro, PM 2007, A comparative study of the strength of Si, SiN and SiC used at nanoscales - Materials and devices. in DA LaVan, MG da Silva, SM Spearing & S Vengallatore (eds), Material research society symposium proceeding. Materials Research Society Symposium Proceedings, vol. 1052, Materials Research Society, Warrendale, pp. 1-5, MRS fall meeting 2007, Boston, USA, 26/11/07.

A comparative study of the strength of Si, SiN and SiC used at nanoscales - Materials and devices. / Alan, T; Sarro, PM.
Material research society symposium proceeding. ed. / DA LaVan; MG da Silva; SM Spearing; S Vengallatore. Warrendale: Materials Research Society, 2007. p. 1-5 (Materials Research Society Symposium Proceedings; Vol. 1052).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - A comparative study of the strength of Si, SiN and SiC used at nanoscales - Materials and devices

AU - Alan, T

AU - Sarro, PM

N1 - NEO

PY - 2007

Y1 - 2007

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-1-55899-990-9

SP - 1

EP - 5

BT - Material research society symposium proceeding

A2 - LaVan, DA

A2 - da Silva, MG

A2 - Spearing, SM

A2 - Vengallatore, S

PB - Materials Research Society

CY - Warrendale

T2 - MRS fall meeting 2007, Boston, USA

Y2 - 26 November 2007 through 30 November 2007

ER -