A comparison between light reflectometry and ellipsometry in the Rayleigh regime.

RC van Duijvenbode, GJM Koper

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	9878-9886
Number of pages	9
Journal	The Journal of Physical Chemistry Part B (Biophysical Chemistry, Biomaterials, Liquids, and Soft Matter)
Volume	2000
Issue number	104
Publication status	Published - 2000

ISSN: 1089-5647

Keywords

@article{9676973240b342298cf63ac3952cb0ab,

title = "A comparison between light reflectometry and ellipsometry in the Rayleigh regime.",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "{van Duijvenbode}, RC and GJM Koper",

note = "ISSN: 1089-5647",

year = "2000",

language = "Undefined/Unknown",

volume = "2000",

pages = "9878--9886",

journal = "The Journal of Physical Chemistry Part B (Biophysical Chemistry, Biomaterials, Liquids, and Soft Matter)",

issn = "1520-6106",

publisher = "American Chemical Society (ACS)",

number = "104",

}

TY - JOUR

T1 - A comparison between light reflectometry and ellipsometry in the Rayleigh regime.

AU - van Duijvenbode, RC

AU - Koper, GJM

N1 - ISSN: 1089-5647

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Article

SN - 1520-6106

VL - 2000

SP - 9878

EP - 9886

JO - The Journal of Physical Chemistry Part B (Biophysical Chemistry, Biomaterials, Liquids, and Soft Matter)

JF - The Journal of Physical Chemistry Part B (Biophysical Chemistry, Biomaterials, Liquids, and Soft Matter)

IS - 104

ER -