A dual-side fabrication method for silicon plate springs with high out-of-plane stiffness

SL Paalvast, HW van Zeijl, PM Sarro, J van Eijk

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	S197-S203
Journal	Journal of Micromechanics and Microengineering
Volume	17
Publication status	Published - 2007

Keywords

@article{01e523e89fa64feb99e430acd804637e,

title = "A dual-side fabrication method for silicon plate springs with high out-of-plane stiffness",

keywords = "professional journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "SL Paalvast and {van Zeijl}, HW and PM Sarro and {van Eijk}, J",

year = "2007",

language = "Undefined/Unknown",

volume = "17",

pages = "S197--S203",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

}

TY - JOUR

T1 - A dual-side fabrication method for silicon plate springs with high out-of-plane stiffness

AU - Paalvast, SL

AU - van Zeijl, HW

AU - Sarro, PM

AU - van Eijk, J

PY - 2007

Y1 - 2007

KW - professional journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 0960-1317

VL - 17

SP - S197-S203

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

ER -