A highly miniaturized, single-chip, large scanning range MOEMS scanner is demonstrated. This intrinsically-aligned, monolithically integrated device uses small angular displacement to provide a linear scanning range of 2000 μm in the lateral and 1000 μm in the vertical direction, at a working distance of 2 cm, with an average operating power lower than 170 mW. Within a footprint of only 7×10 mm2, the presented system fully integrates a photonic interferometer comprising a mirror, a silicon microlens and the MEMS actuator into a single chip, thus offering an unprecedentedly miniaturized scanning solution. The monolithic integration of all photonic components provides intrinsic alignment and excludes coupling losses often encountered in systems composed of discrete parts. No additional attenuation of the optical signal is observed during device operation. This small and high-performance device is suitable as complete system-on-chip for commercial, portable imaging applications.

Original languageEnglish
Title of host publication2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
Place of PublicationPiscataway, NJ
Number of pages4
ISBN (Electronic)978-1-5386-4782-0
Publication statusPublished - 2018
EventMEMS 2018: 31st IEEE International Conference on Micro Electro Mechanical Systems - Belfast, United Kingdom
Duration: 21 Jan 201825 Jan 2018


ConferenceMEMS 2018
CountryUnited Kingdom
Internet address

    Research areas

  • Optical waveguides, Lenses, Optical interferometry, Silicon, Mirrors, Optical device fabrication, Optical imaging

ID: 45355564