A low-cost BiCMOS process with metal gates

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Symposium proceedings. Vol. 611
Editors	LA Clevenger, ... [et Al]
Place of Publication	Warrendale
Publisher	Material Research Society
Pages	1-6
Number of pages	6
ISBN (Print)	0272-9172
Publication status	Published - 2000
Event	Gate Stack and Silicide Issues in Silicon Processing, San Francisco - Warrendale Duration: 25 Apr 2000 → 27 Apr 2000

Name
Publisher	Material Research Society

Conference	Gate Stack and Silicide Issues in Silicon Processing, San Francisco
Period	25/04/00 → 27/04/00

Keywords

@inproceedings{b3c45c389d024533997dc8443eece572,

title = "A low-cost BiCMOS process with metal gates",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "{van Zeijl}, HW and LK Nanver",

year = "2000",

language = "Undefined/Unknown",

isbn = "0272-9172",

publisher = "Material Research Society",

pages = "1--6",

editor = "{LA Clevenger} and {... [et Al]}",

booktitle = "Symposium proceedings. Vol. 611",

note = "Gate Stack and Silicide Issues in Silicon Processing, San Francisco ; Conference date: 25-04-2000 Through 27-04-2000",

}

TY - GEN

T1 - A low-cost BiCMOS process with metal gates

AU - van Zeijl, HW

AU - Nanver, LK

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 0272-9172

SP - 1

EP - 6

BT - Symposium proceedings. Vol. 611

A2 - LA Clevenger, null

A2 - ... [et Al], null

PB - Material Research Society

CY - Warrendale

T2 - Gate Stack and Silicide Issues in Silicon Processing, San Francisco

Y2 - 25 April 2000 through 27 April 2000

ER -