A mass-spectroscopical study of the decomposition of Ti(NMe2)4 in a mixed Ar-H2-N2 pulsed d.c. plasma.

YPM Driessens, AD Kuypers, J Schoonman

    Research output: Contribution to journalArticleScientificpeer-review

    11 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)173-183
    Number of pages11
    JournalSurface and Coatings Technology
    Volume110
    Publication statusPublished - 1998

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