Original language | Undefined/Unknown |
---|---|
Pages (from-to) | 173-183 |
Number of pages | 11 |
Journal | Surface and Coatings Technology |
Volume | 110 |
Publication status | Published - 1998 |
A mass-spectroscopical study of the decomposition of Ti(NMe2)4 in a mixed Ar-H2-N2 pulsed d.c. plasma.
YPM Driessens, AD Kuypers, J Schoonman
Research output: Contribution to journal › Article › Scientific › peer-review
11
Citations
(Scopus)