In this paper, we present an electrothermal biaxial MEMS actuator system, which provides x-A nd y-direction scanning for a fully integrated 3-D optical coherence tomography (OCT) scanner. An angular scanning range of 8° (corresponding to a 7-mm linear scanning range in both directions) is achieved, with an average power consumption of 150 mW. The resonant frequency is 668 and 297 Hz for x-A nd y-directions, respectively. With a footprint of only 2.5×2.5mm2, this system is part of a device which also integrates an optical waveguide and a collimated lens on the same chip, thus making the fully integrated, self-aligned, and miniaturized 3-D OCT scanners feasible.

Original languageEnglish
Pages (from-to)259-268
Number of pages10
JournalJournal of Microelectromechanical Systems
Volume27
Issue number2
DOIs
Publication statusPublished - 2018

    Research areas

  • Al-SiO bimorph beam, integrated OCT, MEMS actuators

ID: 44903032