A MEMS Coriolis Mass Flow Sensing System with Combined Drive and Sense Interface

A. C. De Oliveira; T. V.P. Schut; J. Groenesteijn; Q. Fan; R. J. Wiegerink; K. A.A. Makinwa

doi:10.1109/SENSORS43011.2019.8956695

A MEMS Coriolis Mass Flow Sensing System with Combined Drive and Sense Interface

A. C. De Oliveira, T. V.P. Schut, J. Groenesteijn, Q. Fan, R. J. Wiegerink, K. A.A. Makinwa

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

6 Citations (Scopus)

35 Downloads (Pure)

Abstract

This paper describes an interface circuit for a MEMS Coriolis mass flow sensor that combines both drive and sense circuitry. The MEMS sensor consists of a suspended resonant tube, which is read-out by comb capacitors and driven into oscillation by current flowing through a drive coil in a magnet field. The interface circuit comprises a low-noise front-end that performs capacitance-to-voltage (C/V) conversion, and a drive-loop with automatic amplitude control. Drive motion can also be detected from the output of the front-end, allowing both drive and sense functions to be combined. The front-end is chopped to mitigate its 1/ f noise. When implemented with commercial off-the-shelf (COTS) components, the proposed interface draws 250 mA from a single 5-V supply. Mass flow measurements with Nitrogen gas (N2) show that the sensor's drive frequency drifts by less than 1 mHz (rms) per hour, while its zero stability is less than 2.6 mg/h during an 80s measurement.

Original language	English
Title of host publication	2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Number of pages	4
Volume	2019-October
ISBN (Electronic)	9781728116341
DOIs	https://doi.org/10.1109/SENSORS43011.2019.8956695
Publication status	Published - 2019
Event	18th IEEE Sensors, SENSORS 2019 - Montreal, Canada Duration: 27 Oct 2019 → 30 Oct 2019

Conference

Conference	18th IEEE Sensors, SENSORS 2019
Country/Territory	Canada
City	Montreal
Period	27/10/19 → 30/10/19

Bibliographical note

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

Coriolis
gyroscopic
mass flow
MEMS
sensor interface

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10.1109/SENSORS43011.2019.8956695

08956695Final published version, 1.42 MB

Cite this

De Oliveira, A. C., Schut, T. V. P., Groenesteijn, J., Fan, Q., Wiegerink, R. J., & Makinwa, K. A. A. (2019). A MEMS Coriolis Mass Flow Sensing System with Combined Drive and Sense Interface. In 2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings (Vol. 2019-October). Article 8956695 Institute of Electrical and Electronics Engineers (IEEE). https://doi.org/10.1109/SENSORS43011.2019.8956695

@inproceedings{89dc9cfa088b41d98b73505441a8b457,

title = "A MEMS Coriolis Mass Flow Sensing System with Combined Drive and Sense Interface",

abstract = "This paper describes an interface circuit for a MEMS Coriolis mass flow sensor that combines both drive and sense circuitry. The MEMS sensor consists of a suspended resonant tube, which is read-out by comb capacitors and driven into oscillation by current flowing through a drive coil in a magnet field. The interface circuit comprises a low-noise front-end that performs capacitance-to-voltage (C/V) conversion, and a drive-loop with automatic amplitude control. Drive motion can also be detected from the output of the front-end, allowing both drive and sense functions to be combined. The front-end is chopped to mitigate its 1/ f noise. When implemented with commercial off-the-shelf (COTS) components, the proposed interface draws 250 mA from a single 5-V supply. Mass flow measurements with Nitrogen gas (N2) show that the sensor's drive frequency drifts by less than 1 mHz (rms) per hour, while its zero stability is less than 2.6 mg/h during an 80s measurement.",

keywords = "Coriolis, gyroscopic, mass flow, MEMS, sensor interface",

author = "{De Oliveira}, {A. C.} and Schut, {T. V.P.} and J. Groenesteijn and Q. Fan and Wiegerink, {R. J.} and Makinwa, {K. A.A.}",

note = "Green Open Access added to TU Delft Institutional Repository {\textquoteleft}You share, we take care!{\textquoteright} – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public. ; 18th IEEE Sensors, SENSORS 2019 ; Conference date: 27-10-2019 Through 30-10-2019",

year = "2019",

doi = "10.1109/SENSORS43011.2019.8956695",

language = "English",

volume = "2019-October",

booktitle = "2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings",

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De Oliveira, AC, Schut, TVP, Groenesteijn, J, Fan, Q, Wiegerink, RJ & Makinwa, KAA 2019, A MEMS Coriolis Mass Flow Sensing System with Combined Drive and Sense Interface. in 2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings. vol. 2019-October, 8956695, Institute of Electrical and Electronics Engineers (IEEE), 18th IEEE Sensors, SENSORS 2019, Montreal, Canada, 27/10/19. https://doi.org/10.1109/SENSORS43011.2019.8956695

A MEMS Coriolis Mass Flow Sensing System with Combined Drive and Sense Interface. / De Oliveira, A. C.; Schut, T. V.P.; Groenesteijn, J. et al.
2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings. Vol. 2019-October Institute of Electrical and Electronics Engineers (IEEE), 2019. 8956695.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

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AU - Schut, T. V.P.

AU - Groenesteijn, J.

AU - Fan, Q.

AU - Wiegerink, R. J.

AU - Makinwa, K. A.A.

N1 - Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

PY - 2019

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N2 - This paper describes an interface circuit for a MEMS Coriolis mass flow sensor that combines both drive and sense circuitry. The MEMS sensor consists of a suspended resonant tube, which is read-out by comb capacitors and driven into oscillation by current flowing through a drive coil in a magnet field. The interface circuit comprises a low-noise front-end that performs capacitance-to-voltage (C/V) conversion, and a drive-loop with automatic amplitude control. Drive motion can also be detected from the output of the front-end, allowing both drive and sense functions to be combined. The front-end is chopped to mitigate its 1/ f noise. When implemented with commercial off-the-shelf (COTS) components, the proposed interface draws 250 mA from a single 5-V supply. Mass flow measurements with Nitrogen gas (N2) show that the sensor's drive frequency drifts by less than 1 mHz (rms) per hour, while its zero stability is less than 2.6 mg/h during an 80s measurement.

AB - This paper describes an interface circuit for a MEMS Coriolis mass flow sensor that combines both drive and sense circuitry. The MEMS sensor consists of a suspended resonant tube, which is read-out by comb capacitors and driven into oscillation by current flowing through a drive coil in a magnet field. The interface circuit comprises a low-noise front-end that performs capacitance-to-voltage (C/V) conversion, and a drive-loop with automatic amplitude control. Drive motion can also be detected from the output of the front-end, allowing both drive and sense functions to be combined. The front-end is chopped to mitigate its 1/ f noise. When implemented with commercial off-the-shelf (COTS) components, the proposed interface draws 250 mA from a single 5-V supply. Mass flow measurements with Nitrogen gas (N2) show that the sensor's drive frequency drifts by less than 1 mHz (rms) per hour, while its zero stability is less than 2.6 mg/h during an 80s measurement.

KW - Coriolis

KW - gyroscopic

KW - mass flow

KW - MEMS

KW - sensor interface

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U2 - 10.1109/SENSORS43011.2019.8956695

DO - 10.1109/SENSORS43011.2019.8956695

M3 - Conference contribution

AN - SCOPUS:85078704872

VL - 2019-October

BT - 2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings

PB - Institute of Electrical and Electronics Engineers (IEEE)

T2 - 18th IEEE Sensors, SENSORS 2019

Y2 - 27 October 2019 through 30 October 2019

ER -

A MEMS Coriolis Mass Flow Sensing System with Combined Drive and Sense Interface

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Keywords

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