Abstract
Worlds first graphene-based Pirani pressure sensor is presented. Due to the decreased area and low thickness, the graphene-based Pirani pressure sensor allows for low power applications down to 0.9 mW. Using an innovative, transfer-free process, suspended graphene beams are realized. This allows for up to 100x miniaturization of the pressure sensor area, while enabling wafer-scale fabrication. The response of the miniaturized pressure sensor is similar to that of the much larger state-of-the-art Si-based Pirani pressure sensors, demonstrating the potential of graphene-based Pirani sensors.
| Original language | English |
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| Title of host publication | Proceedings of the 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems |
| Place of Publication | Piscataway, NJ |
| Publisher | IEEE |
| Pages | 11-14 |
| Number of pages | 4 |
| ISBN (Electronic) | 978-1-5386-5273-2 |
| ISBN (Print) | 978-1-5386-5274-9 |
| DOIs | |
| Publication status | Published - 2018 |
| Event | 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Singapore, Singapore Duration: 22 Apr 2018 → 26 Apr 2018 Conference number: 13th |
Conference
| Conference | 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) |
|---|---|
| Country/Territory | Singapore |
| City | Singapore |
| Period | 22/04/18 → 26/04/18 |
Bibliographical note
Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-careOtherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.