A molybdenum MEMS microhotplate for high-temperature operation

L Mele; F Santagata; E Iervolino; M Mihailovic; T Rossi; AT Tran; H Schellevis; JF Creemer; PM Sarro

doi:10.1016/j.sna.2011.11.023

A molybdenum MEMS microhotplate for high-temperature operation

L Mele, F Santagata, E Iervolino, M Mihailovic, T Rossi, AT Tran, H Schellevis, JF Creemer, PM Sarro

Electronic Components, Technology and Materials

Research output: Contribution to journal › Article › Scientific › peer-review

81 Citations (Scopus)

Original language	English
Pages (from-to)	1-8
Number of pages	8
Journal	Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume	188
DOIs	https://doi.org/10.1016/j.sna.2011.11.023
Publication status	Published - 2012

Bibliographical note

harvest
article in press; online available 8 November 2011

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10.1016/j.sna.2011.11.023

Cite this

Mele, L., Santagata, F., Iervolino, E., Mihailovic, M., Rossi, T., Tran, AT., Schellevis, H., Creemer, JF., & Sarro, PM. (2012). A molybdenum MEMS microhotplate for high-temperature operation. Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers, 188, 1-8. https://doi.org/10.1016/j.sna.2011.11.023

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Mele, L, Santagata, F, Iervolino, E, Mihailovic, M, Rossi, T, Tran, AT, Schellevis, H, Creemer, JF & Sarro, PM 2012, 'A molybdenum MEMS microhotplate for high-temperature operation', Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers, vol. 188, pp. 1-8. https://doi.org/10.1016/j.sna.2011.11.023

TY - JOUR

T1 - A molybdenum MEMS microhotplate for high-temperature operation

AU - Mele, L

AU - Santagata, F

AU - Iervolino, E

AU - Mihailovic, M

AU - Rossi, T

AU - Tran, AT

AU - Schellevis, H

AU - Creemer, JF

AU - Sarro, PM

N1 - harvest article in press; online available 8 November 2011

PY - 2012

Y1 - 2012

U2 - 10.1016/j.sna.2011.11.023

DO - 10.1016/j.sna.2011.11.023

M3 - Article

SN - 0924-4247

VL - 188

SP - 1

EP - 8

JO - Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers

JF - Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers

ER -