A new finite element approach to stress analysis in microfabrication technology

S Mijalkovic

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings
Place of Publication	S.l.
Publisher	s.n.
Pages	1-8
Number of pages	8
Publication status	Published - 2000
Event	Small Systems Simulation Symposium 2000, Nis - S.l. Duration: 4 Sept 2000 → 5 Sept 2000

Name
Publisher	S.n.

Conference	Small Systems Simulation Symposium 2000, Nis
Period	4/09/00 → 5/09/00

Keywords

@inproceedings{0133427d88c94e418dd95961a6469c90,

title = "A new finite element approach to stress analysis in microfabrication technology",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "S Mijalkovic",

year = "2000",

language = "Undefined/Unknown",

publisher = "s.n.",

pages = "1--8",

booktitle = "Proceedings",

note = "Small Systems Simulation Symposium 2000, Nis ; Conference date: 04-09-2000 Through 05-09-2000",

}