A new horizon: Using heat to measure distance in high performance metrology solutions

Roy Bijster, Hamed Sadeghian Marnani, Fred van Keulen

Research output: Contribution to conference › Abstract › Scientific

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Original language	English
Number of pages	2
Publication status	Published - 2016
Event	13th International Workshop on Nanomechanical Sensing - Delft, Netherlands Duration: 22 Jun 2016 → 24 Jun 2016

Workshop	13th International Workshop on Nanomechanical Sensing
Abbreviated title	NMC 2016
Country/Territory	Netherlands
City	Delft
Period	22/06/16 → 24/06/16

Access to Document

@conference{b1aba6bae4744b628e68ec85b8e543b9,

title = "A new horizon: Using heat to measure distance in high performance metrology solutions",

author = "Roy Bijster and {Sadeghian Marnani}, Hamed and {van Keulen}, Fred",

year = "2016",

language = "English",

note = "13th International Workshop on Nanomechanical Sensing, NMC 2016 ; Conference date: 22-06-2016 Through 24-06-2016",

}