@inproceedings{b469dea471744b3e98e3a626e1ba6d27,
title = "A new self-sealing thin-film encapsulation process for MEMS",
author = "F Santagata and I Zaccaria and RH Poelma and JF Creemer and GQ Zhang and PM Sarro",
year = "2013",
doi = "10.1109/Transducers.2013.6626893",
language = "English",
isbn = "978-1-4673-5983-2",
publisher = "IEEE Society",
pages = "822--825",
editor = "JR Morante and C Hierold",
booktitle = "Proceedings 17th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXVII",
note = "Transducers 2013 & Eurosensors XXVII, Barcelona, Spain ; Conference date: 16-06-2013 Through 20-06-2013",
}