@inproceedings{c776d6dd15c147cfb30a552c73fd530b,
title = "a noval dual-side fabriation method for silicon plate springs with high out-of plane stifness",
keywords = "Conf.proc. > 3 pag",
author = "J Su and {van Zeijl}, HW and SL Paalvast and PM Sarro and {van Eijk}, J",
year = "2006",
language = "Undefined/Unknown",
isbn = "90-73461-44",
publisher = "SAFE",
pages = "394--397",
editor = "SN",
booktitle = "SAFE conferentie",
note = "SAFE conferentie ; Conference date: 23-11-2006 Through 24-11-2006",
}