A Noval dual-side fabrication method for Silicon Plate Springs with high ouf-of-plane stiffness

HW van Zeijl, SL Paalvast, PM Sarro, J van Eijk

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationMicromechanics Europe 2006
Editors sn
Place of PublicationSouthampton
PublisherMMEW
Pages1-8
Number of pages8
ISBN (Print)085432-848-3
Publication statusPublished - 2006
Eventthe 17th Micro Mechanics Europe Workshop - Southampton
Duration: 3 Sept 20065 Sept 2006

Publication series

Name
PublisherMMEW

Conference

Conferencethe 17th Micro Mechanics Europe Workshop
Period3/09/065/09/06

Keywords

  • Conf.proc. > 3 pag

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