@inproceedings{8592276caf7e48aab563e4001cebc6a8,
title = "A Noval dual-side fabrication method for Silicon Plate Springs with high ouf-of-plane stiffness",
keywords = "Conf.proc. > 3 pag",
author = "{van Zeijl}, HW and SL Paalvast and PM Sarro and {van Eijk}, J",
year = "2006",
language = "Undefined/Unknown",
isbn = "085432-848-3",
publisher = "MMEW",
pages = "1--8",
editor = "sn",
booktitle = "Micromechanics Europe 2006",
note = "the 17th Micro Mechanics Europe Workshop ; Conference date: 03-09-2006 Through 05-09-2006",
}