A novel 3-D tube shaped buried poly-Si Pirani gauge for extended dynamic range with small footprint

F Santagata; E Iervolino; JMW Laros; J Groeneweg; JF Creemer; AW van Herwaarden; PM Sarro

doi:10.1109/MEMSYS.2010.5442326

A novel 3-D tube shaped buried poly-Si Pirani gauge for extended dynamic range with small footprint

F Santagata, E Iervolino, JMW Laros, J Groeneweg, JF Creemer, AW van Herwaarden, PM Sarro

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

1 Citation (Scopus)

Original language	English
Title of host publication	Proceedings 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS 2010)
Editors	Y Suzuki, M Wong
Place of Publication	Piscataway, NJ, USA
Publisher	IEEE Society
Pages	643-646
Number of pages	4
ISBN (Print)	978-1-4244-5764-9/10
DOIs	https://doi.org/10.1109/MEMSYS.2010.5442326
Publication status	Published - 2010
Event	IEEE MEMS 2010, Hong Kong SAR, China - Piscataway, NJ, USA Duration: 24 Jan 2010 → 28 Jan 2010

Publication series

Name
Publisher	IEEE

Conference

Conference	IEEE MEMS 2010, Hong Kong SAR, China
Period	24/01/10 → 28/01/10

Keywords

Conf.proc. > 3 pag

Access to Document

10.1109/MEMSYS.2010.5442326

Cite this

Santagata, F., Iervolino, E., Laros, JMW., Groeneweg, J., Creemer, JF., van Herwaarden, AW., & Sarro, PM. (2010). A novel 3-D tube shaped buried poly-Si Pirani gauge for extended dynamic range with small footprint. In Y. Suzuki, & M. Wong (Eds.), Proceedings 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS 2010) (pp. 643-646). IEEE Society. https://doi.org/10.1109/MEMSYS.2010.5442326

@inproceedings{79e6570261b246adbd067fd3015940e3,

title = "A novel 3-D tube shaped buried poly-Si Pirani gauge for extended dynamic range with small footprint",

keywords = "Conf.proc. > 3 pag",

author = "F Santagata and E Iervolino and JMW Laros and J Groeneweg and JF Creemer and {van Herwaarden}, AW and PM Sarro",

year = "2010",

doi = "10.1109/MEMSYS.2010.5442326",

language = "English",

isbn = "978-1-4244-5764-9/10",

publisher = "IEEE Society",

pages = "643--646",

editor = "Y Suzuki and M Wong",

booktitle = "Proceedings 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS 2010)",

note = "IEEE MEMS 2010, Hong Kong SAR, China ; Conference date: 24-01-2010 Through 28-01-2010",

}

Santagata, F, Iervolino, E, Laros, JMW, Groeneweg, J, Creemer, JF, van Herwaarden, AW & Sarro, PM 2010, A novel 3-D tube shaped buried poly-Si Pirani gauge for extended dynamic range with small footprint. in Y Suzuki & M Wong (eds), Proceedings 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS 2010). IEEE Society, Piscataway, NJ, USA, pp. 643-646, IEEE MEMS 2010, Hong Kong SAR, China, 24/01/10. https://doi.org/10.1109/MEMSYS.2010.5442326

A novel 3-D tube shaped buried poly-Si Pirani gauge for extended dynamic range with small footprint. / Santagata, F; Iervolino, E; Laros, JMW et al.
Proceedings 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS 2010). ed. / Y Suzuki; M Wong. Piscataway, NJ, USA: IEEE Society, 2010. p. 643-646.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - A novel 3-D tube shaped buried poly-Si Pirani gauge for extended dynamic range with small footprint

AU - Santagata, F

AU - Iervolino, E

AU - Laros, JMW

AU - Groeneweg, J

AU - Creemer, JF

AU - van Herwaarden, AW

AU - Sarro, PM

PY - 2010

Y1 - 2010

KW - Conf.proc. > 3 pag

U2 - 10.1109/MEMSYS.2010.5442326

DO - 10.1109/MEMSYS.2010.5442326

M3 - Conference contribution

SN - 978-1-4244-5764-9/10

SP - 643

EP - 646

BT - Proceedings 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS 2010)

A2 - Suzuki, Y

A2 - Wong, M

PB - IEEE Society

CY - Piscataway, NJ, USA

T2 - IEEE MEMS 2010, Hong Kong SAR, China

Y2 - 24 January 2010 through 28 January 2010

ER -

Santagata F, Iervolino E, Laros JMW, Groeneweg J, Creemer JF, van Herwaarden AW et al. A novel 3-D tube shaped buried poly-Si Pirani gauge for extended dynamic range with small footprint. In Suzuki Y, Wong M, editors, Proceedings 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS 2010). Piscataway, NJ, USA: IEEE Society. 2010. p. 643-646 doi: 10.1109/MEMSYS.2010.5442326