A novel dual-side fabrication method for silicon plate springs with high out-of plane stiffness

HW van Zeijl; J Su; SL Paalvast; PM Sarro; J van Eijk

A novel dual-side fabrication method for silicon plate springs with high out-of plane stiffness

HW van Zeijl, J Su, SL Paalvast, PM Sarro, J van Eijk

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings of the 17th MME MicroMechanics Europe Workshop
Editors	s.n.
Place of Publication	Southampton
Publisher	H.Morgan Ed.
Pages	209-212
Number of pages	4
ISBN (Print)	085432-648-3
Publication status	Published - 2006
Event	the 17th MME MicroMechanics Europe Workshop - Southampton Duration: 3 Sept 2006 → 5 Sept 2006

Publication series

Name
Publisher	H.Morgan Ed.

Conference

Conference	the 17th MME MicroMechanics Europe Workshop
Period	3/09/06 → 5/09/06

Keywords

Elektrotechniek
Techniek
conference contrib. refereed
Conf.proc. > 3 pag

Cite this

@inproceedings{bd7ce288b2ed4e218755b408c0e16639,

title = "A novel dual-side fabrication method for silicon plate springs with high out-of plane stiffness",

keywords = "Elektrotechniek, Techniek, conference contrib. refereed, Conf.proc. > 3 pag",

author = "{van Zeijl}, HW and J Su and SL Paalvast and PM Sarro and {van Eijk}, J",

year = "2006",

language = "Undefined/Unknown",

isbn = "085432-648-3",

publisher = "H.Morgan Ed.",

pages = "209--212",

editor = "s.n.",

booktitle = "Proceedings of the 17th MME MicroMechanics Europe Workshop",

note = "the 17th MME MicroMechanics Europe Workshop ; Conference date: 03-09-2006 Through 05-09-2006",

}

A novel dual-side fabrication method for silicon plate springs with high out-of plane stiffness. / van Zeijl, HW; Su, J; Paalvast, SL et al.
Proceedings of the 17th MME MicroMechanics Europe Workshop. ed. / s.n. Southampton: H.Morgan Ed., 2006. p. 209-212.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - A novel dual-side fabrication method for silicon plate springs with high out-of plane stiffness

AU - van Zeijl, HW

AU - Su, J

AU - Paalvast, SL

AU - Sarro, PM

AU - van Eijk, J

PY - 2006

Y1 - 2006

KW - Elektrotechniek

KW - Techniek

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 085432-648-3

SP - 209

EP - 212

BT - Proceedings of the 17th MME MicroMechanics Europe Workshop

A2 - s.n., null

PB - H.Morgan Ed.

CY - Southampton

T2 - the 17th MME MicroMechanics Europe Workshop

Y2 - 3 September 2006 through 5 September 2006

ER -