Original languageUndefined/Unknown
Title of host publicationProceedings of the 9th International Vacuum Microelectronics Conference, IVMC 96
EditorsY Gulayaev
Place of PublicationSt. Petersburg, Rusland
PublisherIVMC 96
Pages358-362
Number of pages5
Publication statusPublished - 1996
Event9th International Vacuum Microelectronics Conference - St. Petersburg, Rusland
Duration: 7 Jul 199612 Jul 1996

Publication series

Name
PublisherIVMC 96

Conference

Conference9th International Vacuum Microelectronics Conference
Period7/07/9612/07/96

ID: 3114918